Contact: +82-31-451-5103 / sales@pstek.co.kr
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ESC Power Supplies for Semiconductor Process

PSTEK’s electrostatic chuck power system for semiconductor processing can improve the productivity of processing by achieving an effective dechucking, using the function of load electric discharge based on internal ground. Various protection functions such as built-in RF filter and digital arc regulation not only can effectively protect devices and wafers but also can minimize the defect rate.

This product stability and productivity has been proven through extensive field testing at large Korean companies.

Features & Benefits

  • Proven stability
  • The product stability has been proven through extensive field testing at large enterprises

  • Device protection & improved spatial efficiency
  • The built-in filter to block high frequencies protects devices from high frequencies
  • The compact size improves the efficiency of installation space
  • Wafer protection through digital arc regulation
  • Arc blocking within about 4㎲ after the occurrence of an arc
  • Pause time from power down to reoperation can be set
  • OCP operates when the output current is 5 mA or more
  • Improved productivity
  • The processing time is minimized, with the output rise speed at 0.1s
  • The function of load electric discharge allows for effective dechucking
  • High reliability
  • The voltage fluctuation range is within ±0.5 % of output voltage (At 3 kV, the voltage fluctuation range is ±15 V)
  • Improved usability
  • The power supply displays load electrostatic capacity for checking the processing state
  • Our independently developed PC program enables remote control for user convenience
  • Can be linked with PLC
  • Economical prices
  • Lower prices compared to other companies, enabling a reduction in investment costs

Specifications

Contents PSES-24300PB
Output
Voltage
+ 3000 ~ - 3000V
Max. Current
4mA
Max. Power
12W
Power Range
Avg. in ±5%
Voltage Range
Avg. in ±0.5%
Input
Voltage
DC 24V
Voltage Range
DC 23.52~24.48V(±2%)
Max. Current
1.5A
Power Factor
> 90%
Others
Control
Constant current and voltage control
Dimension(W x D x H)
241 x 340 x 88 mm

Applications

  • Semiconductor Process

Contact Us

Contact Us

Please include product name/quantity for request or other sales question:

Mr. Hyunil Kim

E-mail : sales@pstek.co.kr

TEL : +82-31-451-5103

25-25, Gunpocheomdansaneop 1-ro, Gunpo-si, Gyeonngi-do, Korea 15881

  • +82-31-451-5103
  • sales@pstek.co.kr
  • 25-25, Gunpocheomdansaneop 1-ro, Gunpo-si, Gyeonngi-do, Korea 15881

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