Contact: +82-31-451-5103 / sales@pstek.co.kr

DC Plasma Power Supplies

PSTEK’s basic plasma power supplies boast higher efficiency thanks to the adoption of the newest switching devices. In particular, rapid digital arc regulation can improve process stability and coating quality. The stability of our technology has been proven through a long testing period in the industrial sites of our customers, and this technology is being supplied to customers in a range of industrial areas, such as semiconductor, display and coating.

Features & Benefits

  • Stable operation
  • Stability has been proven through a long testing period in industrial sites
  • System configuration that minimizes the damage to hardware in the event of an output load short
  • Various Protection: OCP(Over Current Protection), OVP(Over Voltage Protection), OTP(Over Temperature Protection), etc.
  • Rapid digital arc regulation
  • Rapid digital arc regulation ensures a high coating rate and enables an even lamination of thin layers
  • Reduced damage to board, higher process stability
  • High efficiency
  • Efficiency improved by applying SiCFET, the newest switching device allowing rapid switching
  • Economical prices
  • Lower prices compared to other companies, enabling a reduction in investment costs

Specifications

Contents PSPD-10080WB PSPD-10080WC PSPD-20080WB PSPD-20080WC
Output
Max. Power
10kW
20kW
Max. Voltage
800V
800V
Max. Current
< 25A
< 50A
Efficiency
> 90%
Ignition Voltage
1500V
Input
Voltage
3-phase 220V
3-phase 380V
3-phase 220V
3-phase 380V
Frequency
47 ~ 63Hz
Power Factor
> 90%
Machine factors
Weight
25kg
35kg
Dimension(W x D x H)
480 x 760 x 132 mm
Cooling type
Forced Air
Communication
Analog
0-5V, 0-10V
Digital
RS485, RS232C
Protocol
Modbus, CAN, Profibus(Option), Device-Net(Option)
Others
Protection
Over voltage, over current, Arc Rate, Over Temperature
Functions
Arc counting, Run time counting

Applications

  • Semiconductor
  • Dry Etching(ICP,CCP)​
  • Cleaning
  • Desposition(PVD, PECVD, PEALD)
  • Display
  • Desposition(PVD, PECVD)
  • Coating
  • Automotive parts (accessories) hard coating
  • Tool Hard Coating
  • Other machinery hard coating
  • Cell phone case hard coating
  • Optical film coating
  • Medical Parts

Contact Us

Contact Us

Please include product name/quantity for request or other sales question:

Mr. Hyunil Kim

E-mail : sales@pstek.co.kr

TEL : +82-31-451-5103

25-25, Gunpocheomdansaneop 1-ro, Gunpo-si, Gyeonngi-do, Korea 15881

  • +82-31-451-5103
  • sales@pstek.co.kr
  • 25-25, Gunpocheomdansaneop 1-ro, Gunpo-si, Gyeonngi-do, Korea 15881

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