Contact: +82-31-451-5103 / sales@pstek.co.kr

RF Plasma Power Supplies

RF technology is suitable for processes that require high precision and reproducibility. PSTEK’s RF plasma power supply ensures stability over extended operation times, and offers a high matching precision as well as improved productivity and top-quality outcomes.

Features & Benefits

Auto matching

  • High matching precision
  • Applies optimal algorithm for precise matching
  • Stability over extended operation times
  • A highly reliable capacitor is applied to ensure stability over extended operation periods
  • Wide load range
  • Matching solution configuration that is suitable for various load characteristics

  • The plasma density value can be checked
  • DC bias value precise sensing configuration

RF Generator

  • Stability of long-time operation
  • Proven stability through actual loading operation stability test

  • Multiple RFs can be applied to the same chamber.
  • Output phase shift function included
  • CEX function included
  • Economical prices
  • Lower prices compared to other companies, enabling a reduction in investment costs

Specifications

Contents RSRF Series
Output
Power Range
150 ~ 6000W
Load Impedance
50Ω
Frequency
13.56MHz ± 0.005%
Input
Voltage
3-phase, 220V
Frequency
50/60Hz ± 5%
Current
12.9A
Machine factors
Weight
20kg
Dimension(W x D x H)
241 x 603 x 155 mm
Cooling type
Forced Air

Communication

Interface

Analog
0-5V, 0-10V
Digital
RS485, RS232C
Protocol
Modbus, CAN, Profibus(Option), Device-Net(Option)
Others
Protection
Over voltage, over current, Arc Rate, Over Temperature
Connecting type
N type female

Applications

  • Semiconductor
  • Dry Etching(ICP,CCP)​
  • Cleaning
  • Desposition(PVD, PECVD, PEALD)
  • Display
  • Desposition(PVD, PECVD)
  • Coating
  • Automotive parts (accessories) hard coating
  • Tool Hard Coating
  • Other machinery hard coating
  • Cell phone case hard coating
  • Optical film coating
  • Medical Parts

Contact Us

Contact Us

Please include product name/quantity for request or other sales question:

Mr. Hyunil Kim

E-mail : sales@pstek.co.kr

TEL : +82-31-451-5103

25-25, Gunpocheomdansaneop 1-ro, Gunpo-si, Gyeonngi-do, Korea 15881

  • +82-31-451-5103
  • sales@pstek.co.kr
  • 25-25, Gunpocheomdansaneop 1-ro, Gunpo-si, Gyeonngi-do, Korea 15881

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